Method of manufacturing metal foil/ceramics joining material...

Stock material or miscellaneous articles – Composite – Of metal

Reexamination Certificate

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C428S697000, C428S698000, C428S699000, C428S702000, C428S940000, C228S115000, C228S234100, C228S235100, C228S235200, C228S205000

Reexamination Certificate

active

06689482

ABSTRACT:

FIELD OF THE INVENTION
The present, invention relates to a manufacturing method of a combination material of metal foil and ceramic by joining a metal foil onto surfaces of various types of ceramics, and also relates to a metal foil laminated ceramic substrate manufactured from said combination material of metal foil and ceramic.
PRIOR ART
Recently, a new improvement has been attempted by combining ceramics with metals in the application fields of ceramics. For example, a metal material composed of nickel alloy, titanium alloy, chromium alloy, or the like is joined to a ceramic material composed of alumina, zirconia, magnesia, or the like by using a combination technique such as diffusion combination so as to manufacture a combination material of metal and ceramic, which is used in various devices and apparatuses.
BACKGROUND OF THE INVENTION
However, since such conventional combination material of metal and ceramic is manufactured by simply joining a metal material to a ceramic material under a certain pressure, when the pressure is applied, there sometimes occurs fracture of the ceramic material which is a much more brittle material as compared with the metal material, thus causing problems in productivity.
An object of the present invention is to solve the problem mentioned above and provide a manufacturing method of a combination material of metal foil and ceramic capable of completely joining a metal foil to a ceramic material even with a low pressure applied thereto and preventing the ceramic material from fracturing so as to improve the productivity of a combination material of metal foil and ceramic or a metal foil laminated ceramic substrate, and also provide such metal foil laminated ceramic substrate.
DISCLOSURE OF THE INVENTION
In order to achieve the object mentioned above, the manufacturing method of a combination material of metal foil and ceramic comprises the steps of ion-etching a surface of a metal foil and a ceramic material to be joined together to activate and clean the surfaces, heating said surface of the ceramic material, which is held on a holder, to a temperature range of 250 to 500° C., pressure-welding said surface of the metal foil to said surface of the ceramic material held on the holder under a pressure not more than 1 kg/mm
2
, and thus heat-joining the metal foil and the ceramic material to manufacture a combination material of metal foil and ceramic.


REFERENCES:
patent: 4709844 (1987-12-01), Sekiguchi et al.
patent: 5534103 (1996-07-01), Yano et al.
patent: 60-30593 (1985-02-01), None
patent: 61-97174 (1986-05-01), None
patent: 61-270269 (1986-11-01), None
patent: 4-467070 (1992-02-01), None
patent: 404046070 (1992-02-01), None
patent: 6-302486 (1994-10-01), None

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