Fishing – trapping – and vermin destroying
Patent
1992-04-10
1993-02-09
Quach, T. N.
Fishing, trapping, and vermin destroying
437161, 437228, 437944, 437962, 156643, 156646, 156656, 1566591, 148DIG105, 148DIG106, H01L 21283, H01L 2131
Patent
active
051852934
ABSTRACT:
A method is described for forming patterns in deposited overlayers on GaAs and for aligning the formed patterns with etch features produced through dry processing. The deposited overlayers on GaAs are protected during pattern formation and subsequent processing by a durable, process integrable mask of hydrogenated amorphous carbon.
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Franke Hans G.
Prince Eric T.
Eastman Kodak Company
Owens Raymond L.
Quach T. N.
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