Data processing: measuring – calibrating – or testing – Testing system
Reexamination Certificate
2002-05-24
2004-09-14
Bui, Bryan (Department: 2863)
Data processing: measuring, calibrating, or testing
Testing system
C702S117000, C702S118000, C702S119000, C702S120000
Reexamination Certificate
active
06792373
ABSTRACT:
FIELD OF THE INVENTION
The invention relates to semiconductor testing.
BACKGROUND OF THE INVENTION
Semiconductor companies test components to ensure that the components operate properly. The test data not only determine whether the components function properly, but also may indicate deficiencies in the manufacturing process. Accordingly, many semiconductor companies may analyze the collected data from several different components to identify problems and correct them. For example, the company may gather test data for multiple chips on each wafer among several different lots. This data may be analyzed to identify common deficiencies or patterns of defects or identify parts that may exhibit quality and performance issues and to identify or classify user-defined “good parts”. Steps may then be taken to correct the problems. Testing is typically performed before device packaging (at wafer level) as well as upon completion of assembly (final test).
Gathering and analyzing test data is expensive and time consuming. Automatic testers apply signals to the components and read the corresponding output signals. The output signals may be analyzed to determine whether the component is operating properly. Each tester generates a large volume of data. For example, each tester may perform 200 tests on a single component, and each of those tests may be repeated 10 times. Consequently, a test of a single component may yield 2000 results. Because each tester is testing 100 or more components an hour and several testers may be connected to the same server, an enormous amount of data must be stored. Further, to process the data, the server typically stores the test data in a database to facilitate the manipulation and analysis of the data. Storage in a conventional database, however, requires further storage capacity as well as time to organize and store the data.
The analysis of the gathered data is also difficult. The volume of the data may demand significant processing power and time. As a result, the data is not usually analyzed at product run time, but is instead typically analyzed between test runs or in other batches.
To alleviate some of these burdens, some companies only sample the data from the testers and discard the rest. Analyzing less than all of the data, however, ensures that the resulting analysis cannot be fully complete and accurate. As a result, sampling degrades the complete understanding of the test results.
In addition, acquiring the test data presents a complex and painstaking process. A test engineer prepares a test program to instruct the tester to generate the input signals to the component and receive the output signals. The program tends to be very complex to ensure full and proper operation of the component. Consequently, the test program for a moderately complex integrated circuit involves a large number of tests and results. Preparing the program demands extensive design and modification to arrive at a satisfactory solution, and optimization of the program, for example to remove redundant tests or otherwise minimize test time, requires additional exertion.
SUMMARY OF THE INVENTION
A method and apparatus for testing semiconductors according to various aspects of the present invention comprises a test system comprising an outlier identification element configured to identify significant data in a set of test results. The test system may be configured to provide the data in an output report. The outlier identification element suitably performs the analysis at run time. The outlier identification element may also operate in conjunction with a smoothing system to smooth the data and identify trends and departures from test result norms.
REFERENCES:
patent: 5668745 (1997-09-01), Day
patent: 5835891 (1998-11-01), Stoneking
patent: 6184048 (2001-02-01), Ramon
patent: 6366851 (2002-04-01), Chojnacki et al.
Clauia Becker, Performance Criteria for Multivariate outlier Identification procedures, 2000, University of Dortmund, Department of Statistics, Germany, 1page.
Bui Bryan
Noblitt & Gilmore, LLC.
Test Advantage, Inc.
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