Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
Patent
1996-02-20
1998-10-13
Nguyen, Vinh P.
Electricity: measuring and testing
Fault detecting in electric circuits and of electric components
Of individual circuit component or element
324765, G01R 1908
Patent
active
058217665
ABSTRACT:
A method and apparatus for measuring the metallurgical channel length of a semiconductor device includes the steps of determining capacitance of gate to substrate in a multiple MOS transistor pattern and MOS capacitor pattern which have the same gate area; subtracting the capacitance of gate to substrate in a MOS transistor from that in a MOS capacitor for providing a difference curve; determining the overlap length by using the capacitance corresponding to a peak shown in the differences curve; and subtracting two times the overlap length .DELTA.L from the gate length Ldrawn in the MOS transistor for providing the metallurgical channel length.
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Jo Myung-Suk
Kim Jin-Hyoung
Kim Sung-Ki
Lee Dai-Hoon
Yoon Han-Sub
Hyundai Electronics Industries Co,. Ltd.
Nguyen Vinh P.
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