Vertically-coupled arrow modulators or switches on silicon

Details Vertically-coupled arrow modulators or switches on silicon Vertically-coupled arrow modulators or switches on silicon

1991-11-22

1994-01-04

Bovernick, Rodney B.

Optical waveguides

With optical coupler

Input/output coupler

385 8, 65 602, G02B 612

Patent

active

052767485

ABSTRACT:
An optical modulator is disclosed. The modulator is based upon an ARROW waveguide, consisting of a substrate, a lower cladding, an interference layer, and a core layer. An electronic element is formed in the structure to control the free-carrier concentration in the interference layer. The light is coupled by grating into the interference layer, where the free-carrier concentration is controlled by the element, which in turn controls the modulation of the light in the interference layer before it is coupled back to the core layer.

REFERENCES:
patent: 4869568 (1989-09-01), Schimpe
patent: 4904045 (1990-02-01), Alferness et al.
patent: 4971415 (1990-11-01), Hara et al.
Duguay, M. A., Kokubun, Y., Koch, T. L., Pfeiffer, L., "Antiresonant Reflecting Optical Waveguides in SiO.sub.2 -Si Multilayer Structures", Applied Physics Letters, vol. 49, pp. 13-15, 1986.
Soref, R. A., Lorenzo, J. P., "All-silicon Active and Passive Guided-wave Components for .lambda.=1.3 and 1.6 .mu.m," IEEE Journal of Quantum Electronics, QE-22, pp. 873-879, 1986.
Koch, T. L., Burkhardt, E. G., Storz, F. G., Bridges, T. J., Sizer, T., II, "Vertically Grating-coupled ARROW Structures for III-V Integrated Optics," IEEE Journal of Quantum Electronics, QE-23, pp. 889-897, 1987.

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