Radiant energy – Photocells; circuits and apparatus – Housings
Reexamination Certificate
2002-06-12
2003-08-05
Pyo, Kevin (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Housings
C414S222010, C414S935000
Reexamination Certificate
active
06603117
ABSTRACT:
BACKGROUND OF THE INVENTION
The present invention relates generally to a self contained sensing apparatus and system and, more particularly, to a self contained sensing apparatus for monitoring or measuring one or more parameters, performing visual inspections, calibration or otherwise obtaining information within a controlled environment, such as in a sealed semiconductor wafer processing chamber.
There are many situations in which it is desirable to have the ability to measure or monitor one or more parameters or to make visual inspections or calibration within a controlled environment which is not readily accessible. For example, it is desirable to have the ability to monitor one or more parameters, such as temperature, pressure, etc. within a controlled environment such as the environment within an operating semiconductor wafer processing chamber. The environment within such a semiconductor wafer processing chamber, particularly during the processing of semiconductor wafers, includes high vacuum pressures and low visibility. The use of existing, standard, monitoring equipment and/or techniques within such a semiconductor wafer processing chamber is ineffective because most existing monitoring equipment is not constructed to withstand the conditions present or to operate within the physical or dimensional constraints within such a semiconductor wafer processing chamber. The present invention overcomes the problems of the prior art by providing a self contained sensing apparatus for insertion into a controlled environment, such as the interior of a semiconductor processing chamber, for the purpose of monitoring or measuring one or more such parameters and/or performing visual inspections, calibration or otherwise obtaining information concerning features within the controlled environment. In a preferred embodiment, as described below, the present invention comprises a self contained apparatus for viewing the interior of a semiconductor wafer processing chamber for the purpose of inspection, calibration or other applications. The described viewing apparatus is of a particular size and shape which facilitates insertion of the apparatus into the semiconductor wafer processing chamber through an existing gate opening so as to preclude a significant disruption of any semiconductor processing which may be ongoing within the chamber. The described viewing apparatus is also particularly suited to be received within the robotic arm within the semiconductor wafer processing chamber to facilitate movement of the apparatus for viewing at various locations within the semiconductor processing chamber. The apparatus contains a transmitter for transmitting viewed images to a receiver outside of the semiconductor wafer processing chamber for receiving and displaying the viewed images in real time or near real time.
BRIEF SUMMARY OF THE INVENTION
Briefly stated, the present invention comprises a self contained sensing apparatus including a housing establishing an interior compartment. The housing has a thickness which is less than the size of an access portal for inserting the housing into an area for sensing. The housing includes a window extending through a principal housing surface. A sensor is located within the housing and is generally aligned with the window for sensing at least one parameter through the window. In a preferred embodiment, the sensor comprises an optical sensor for sensing images through the window. A transmitter within the housing is coupled with the sensor for receiving signals representative of the parameter or images sensed and transmitting the signals out of the housing. In a preferred embodiment, a receiver is located out of the area being sensed for receiving the transmitted signals. The receiver is coupled to a monitor for displaying the sensed parameter or images.
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Corrado Christopher
Edwards Timothy
Quartapella Carmin
Rawa George
Akin Gump Strauss Hauer & Feld L.L.P.
Greene, Tweed & Co.
Pyo Kevin
Sohn Seung C.
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