Semiconductor device manufacturing: process – Having superconductive component
Reexamination Certificate
2002-05-31
2003-10-28
Mulpuri, Savitri (Department: 2812)
Semiconductor device manufacturing: process
Having superconductive component
C438S029000, C438S032000, C438S046000
Reexamination Certificate
active
06638773
ABSTRACT:
BACKGROUND OF THE INVENTION
1. Field of the Invention
This invention relates to distributed Bragg reflector (DBR) lasers and, in particular, to DBR lasers having a quarter-wavelength (&lgr;/4) phase shift section for improved single-longitudinal mode operation thereof.
2. Description of the Related Art
The following descriptions and examples are not admitted to be prior art by virtue of their inclusion within this section.
There are several types of lasers, including gas lasers, solid-state lasers, liquid (dye) lasers, free electron, and semiconductor lasers. All lasers have a laser cavity defined by at least two laser cavity mirrors, and an optical gain medium in the laser cavity. The gain medium amplifies electromagnetic waves (light) in the cavity by stimulated emission, thereby providing optical gain.
In semiconductor lasers, a semiconductor active region serves as the gain medium. Semiconductor lasers may be diode (bipolar) lasers or non-diode, unipolar lasers such as quantum cascade (QC) lasers. Semiconductor lasers are used for a variety of industrial and scientific applications and can be built with a variety of structures and semiconductor materials.
The use of semiconductor lasers for forming a source of optical energy is attractive for a number of reasons. Semiconductor lasers have a relatively small volume and consume a small amount of power as compared to conventional laser devices. Further, semiconductor lasers can be fabricated as monolithic devices, which do not require a combination of a resonant cavity with external mirrors and other structures to generate a coherent output laser beam.
The optical gain of a laser is a measure of how well a gain medium such as an active region amplifies photons by stimulated emission. The primary function of the active region in a semiconductor laser is to provide sufficient laser gain to permit lasing to occur. The active region may employ various materials and structures to provide a suitable collection of atoms or molecules capable of undergoing stimulated emission at a given lasing wavelength, so as to amplify light at this wavelength. The active region may comprise, for example, a superlattice structure, or a single- or multiple quantum well (MQW) structure.
Amplification by stimulated emission in the active region of a semiconductor laser is described as follows. The semiconductor active region contains some electrons at a higher, excited state or energy level, and some at a lower, resting (ground) state or energy level. The number and percentage of excited electrons can be increased by pumping the active region with a pumping energy, from some energy source such as an electrical current or optical pump. Excited electrons spontaneously fall to a lower state, “recombining” with a hole. The recombination may be either radiative or non-radiative. When radiative recombination occurs, a photon is emitted with the same energy as the difference in energy between the hole and electron energy states.
Stimulated emission, as opposed to spontaneous emission, occurs when radiative recombination of an electron-hole pair is stimulated by interaction with a photon. In particular, stimulated emission occurs when a photon with an energy equal to the difference between an electron's energy and a lower energy interacts with the electron. In this case, the photon stimulates the electron to fall into the lower energy state, thereby emitting a second photon. The second photon has the unique property that it has the same energy, frequency, and phase as the original photon. Thus, when the photons produced by spontaneous (or stimulated) emission interact with other high energy state electrons, stimulated emission can occur so that two photons with identical characteristics are present. (Viewed as waves, the atom emits a wave having twice the amplitude as that of the original photon interacting with the atom.) I.e., one photon of a given. energy, frequency, and phase produces a second photon of the same energy, frequency, and phase; and these two photons may each, if not absorbed, stimulate further photon emissions, some of which can themselves stimulate further emissions, and so on.
Amplification by stimulated emission requires that more photons are produced by stimulated emission than are absorbed by lower-state electrons. This condition, known as population inversion, occurs when there are more excited (upper lasing level) electrons than ground-state (lower lasing level) electrons. If there were more lower state than upper state electrons, then more photons would be absorbed by the lower energy electrons (causing upward excitations) than would be produced by stimulated emission. When there is a population inversion, however, enough electrons are in the excited state so as to prevent absorption by ground-state electrons from sabotaging the amplification process. Thus, when population inversion is achieved, stimulated emission predominates over stimulated absorption, thus producing amplication of light (optical gain). If there is population inversion, lasing is therefore possible, if other necessary conditions are also present.
Population inversion is achieved by applying a sufficient pumping energy to the active region, to raise a sufficient number of electrons to the excited state. Various forms of pumping energy may be utilized to excite electrons in the active region and to achieve population inversion and lasing. For example, semiconductor lasers of various types may be electrically pumped (EP), by a DC or alternating current. Optical pumping (OP) or other pumping methods, such as electron beam pumping, may also be used. EP semiconductor lasers are typically powered by applying an electrical potential difference across the active region, which causes a current to flow therein. As a result of the potential applied, charge carriers (electrons and holes) are injected from opposite directions into an active region. This gives rise to an increase in spontaneous generation of photons, and also increases the number of excited state electrons so as to achieve population inversion.
In a semiconductor laser, an active region is sandwiched between the cavity mirrors, and pumped with a pumping energy to cause population inversion. Photons are spontaneously emitted in the active region. Some of those photons travel in a direction perpendicular to the reflectors of the laser cavity. As a result of the ensuing reflections, the photons travel through the active region multiple times, being amplified by stimulated emission on each pass through the active region. Thus, photons reflecting in the cavity experience gain when they pass through the active region. However, loss is also experienced in the cavity, for example by extraction of the output laser beam, which can be about 1% of the coherent cavity light, by absorption or scattering caused by less than perfect (100%) reflectance (reflectivity) of the cavity mirrors, and other causes of loss.
Therefore, for lasing to occur, there must be not only gain (amplification by stimulated emission) in the active region, but enough gain to overcome all losses in the laser cavity as well as allow an output beam to be extracted, while still allowing laser action to continue. Gain is a function of wavelength. The minimum gain that will permit lasing, given the cavity losses, for a given wavelength or wavelength range, is the threshold lasing gain of the laser medium for that wavelength or range. A given wavelength is associated with a given threshold gain, and may be characterized by that threshold gain, for a given laser structure. (For EP lasers, the lowest drive current level at which the output of the laser results primarily from stimulated emission rather than spontaneous emission is referred to as the lasing threshold current.)
When the active region provides the threshold lasing gain over a given wavelength range, there will be a sufficient amount of radiative recombinations stimulated by photons, so that the number of photons traveling between the reflectors tends to increase, giving rise to amplification
Anselm Klaus Alexander
Hwang Wen-Yen
Zheng Jun
Applied Optoelectronics, Inc.
Kinsella N. Stephan
Mulpuri Savitri
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