Method and apparatus for coating a film on an object being proce

Details Method and apparatus for coating a film on an object being proce Method and apparatus for coating a film on an object being proce

1997-08-21

1999-08-17

Simmons, David A.

Coating apparatus

Control means responsive to a randomly occurring sensed...

Condition of coated material

118712, 2502222, 250574, 356337, G03G 1508, G01V 800

Patent

active

059388471

ABSTRACT:
Disclosed herein is a method and an apparatus for applying a coating liquid to an object from a liquid-applying member at a first prescribed position, thereby forming a film on the object. Before the coating liquid at the first position, the coating liquid is applied at a second predetermined position. An impurity-detecting device detects the impurities contained in the coating liquid applied at the second position. A particle-counting device is provided, and a switching device is provided on a liquid-supplying pipe extending from a source of the coating liquid to the liquid-applying member. The switching device switches the supply of the coating liquid between the liquid-applying member and the impurity-detecting device. The impurities in the coating liquid can thereby monitored.

REFERENCES:
patent: 5002008 (1991-03-01), Ushijima et al.
patent: 5090808 (1992-02-01), Ishikawa et al.
patent: 5509375 (1996-04-01), Sayka et al.

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