On-chip ground plane for semiconductor devices to reduce parasit

Details On-chip ground plane for semiconductor devices to reduce parasit On-chip ground plane for semiconductor devices to reduce parasit

1994-06-30

1996-01-16

Limanek, Robert P.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including high voltage or high power devices isolated from...

257347, 257508, 257901, 257517, H01L 2972, H01L 2704

Patent

active

054850290

ABSTRACT:
A semiconductor chip having an on-chip ground plane comprising a low resistivity semiconductor region in a plurality of non-device regions of the chip and reach-through regions electrically connected to the low resistivity semiconductor region. One or more front-side contacts are used to electrically connect the reach-through regions and the low resistivity semiconductor region to a ground potential to electrically ground the on-chip ground plane.

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