Process for forming and using a non-reactive anti-reflection coa

Details Process for forming and using a non-reactive anti-reflection coa Process for forming and using a non-reactive anti-reflection coa

1995-06-07

1998-10-13

Speer, Timothy M.

Coating processes

Optical element produced

4302711, 4302751, 4302781, 430314, 430317, 430318, G03C 100

Patent

active

058209263

ABSTRACT:
An anti-reflection coating is provided that has a barrier layer and an anti-reflective layer. The barrier layer stops reactions between the anti-reflective layer and underlying layers or substrates, does not make the anti-reflective layer reflective, and preferably does not react with either the reflective layer or the anti-reflective layer. In particular embodiments, the barrier layer is a thin layer of silicon dioxide SiO.sub.2 or silicon nitride Si.sub.3 N.sub.4, and the anti-reflective layer is titanium-tungsten TiW, titanium nitride TiN, or amorphous silicon.

REFERENCES:
patent: 4668335 (1987-05-01), Mockler
patent: 4782380 (1988-11-01), Shankar
patent: 4820611 (1989-04-01), Arnold
patent: 4857418 (1989-08-01), Schuetz
patent: 5120679 (1992-06-01), Boardman
patent: 5135877 (1992-08-01), Albergo
patent: 5219788 (1993-06-01), Abernathey
patent: 5290734 (1994-03-01), Boardman

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