Method of manufacturing a liquid jet recording head

Details Method of manufacturing a liquid jet recording head Method of manufacturing a liquid jet recording head

1997-01-02

1998-10-13

Pianalto, Bernard

Coating processes

Electrical product produced

427261, 427299, 4274192, B05D 512

Patent

active

058209190

ABSTRACT:
A substrate for liquid jet recording head comprises a supporting member with an oxidized film on its surface, exothermic resistive members arranged on the supporting member, and wirings electrically connected to the exothermic resistive members. For the substrate, it is arranged that the dislocation density in the area beneath the oxidized film on said supporting member is less than 5.times.10.sup.4 pieces/cm.sup.2 ; hence eliminating the curves of the substrate which will be created when it is cut for the fabrication of a liquid jet recording head.

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Wolf, S. et al. "Silicon Processing for the VLSI Era, vol. 1: Process Technology", Lattice Press (1986), pp. 40-56 and 532-534. (No month avail.).

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