Wideband vibration sensor

Details Wideband vibration sensor Wideband vibration sensor

1997-03-20

1999-02-23

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73654, G01P 1513

Patent

active

058746757

ABSTRACT:
This invention relates to an apparatus for making highly sensitive measurements of acceleration. The vibration sensor includes the use of a movable gate field effect transistor to sense the motion of a cantilever beam with respect to its base, it also includes an actuator element formed by a pair of electrodes actuating electrostatically on the beam. A feedback control loop is also included for force balance operation resulting in a very wide dynamic range for the sensor.

REFERENCES:
patent: 3413573 (1968-11-01), Nathanson et al.
patent: 3585466 (1971-06-01), Davis, Jr.
patent: 4483194 (1984-11-01), Rudolf
patent: 4841775 (1989-06-01), Ikeda et al.
patent: 4873871 (1989-10-01), Bai et al.
patent: 5001933 (1991-03-01), Brand
patent: 5095752 (1992-03-01), Suzuki et al.
patent: 5103279 (1992-04-01), Gutteridge
patent: 5205171 (1993-04-01), O'Brien et al.
patent: 5293095 (1994-03-01), Tamara et al.
patent: 5345824 (1994-09-01), Sherman et al.
patent: 5417312 (1995-05-01), Tsuchitani et al.
patent: 5456111 (1995-10-01), Hulsing
patent: 5540095 (1996-07-01), Sherman et al.
Harvey C. Nathanson, William E. Newell, Robert A. Wickstrom, & John R. Davis, Jr., "The Resonant Gate Transistor", IEEE Transactions on Electron Devices, Mar. 1967, pp. 117-133, vol. ED-14, No. 3.
M.J. Usher, I.W. Buckner, & R.F. Burch, "A Miniature Wideband horizontal-component feedback seismometer", Journal of Physics E. Scienific Instruments, 1977, pp. 1253-1260, vol. 10, Great Britian.
Kevin E. Burcham, Gregory N. DeBrabander, & Joseph T. Boyd, "Micromachined Silicon Cantilever Beam Accelerometer Incorporating and Integrated Optical Waveguide", Proc. of Int. Optics and Microstructures, 1992, pp. 12-18, SPIE vol. 1793.
Takashi Yoshida, Takahiro Kudo, Satoshi Kato, Shun-Ichi Miyazaki, Shinjiro Kiyono, & Kyoichi Ikeda, "Strain Sensitive Resonant Gate Transistor", IEEE Proceedings of MEMS95, Amsterdam, 1995, pp. 316-321.
Shun-Cihi Miyazaki, Takashi Yoshida, & Kyoichi Ikeda, "Strain Sensitive Resonant Gate Transistor", Proceedings of Micromachined Devices and Components II, SPIE vol. 2882, 1996, pp. 278-285.
Adolfo Guiterrez, Daniel Edmans, Chris Cormeau, Gernot Seidler, Dave Deangelis, & Edward Maby, Silicon Micromachined Sensor for Broadband Vibration Analysis Proc. of Int'l Conf. on Int. Micro/Nanotechnology for space appl., 1995, Houston, TX.
E.W. Maby, C.M. Cormeau, D.M. Edmans, & J.G. Fiorenza, "Micro-microphones for Insect Detection", Proceedings of the Second Symposium on Agroacoustics, National Center for Physical Acoustics, University of Mississippi, May 1996, pp. 1-8.
E.W. Maby, C.M. Cormeau, D.M. Edmans, J.G. Fiorenza, Micro-microphones for Insect Detection, Abstracts, 2nd Symposium on Agroacoustics, National Center for Physical Acoustics, University of Mississippi, Sep. 1995.

Affiliated with

Also associated with

Rating

Wideband vibration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wideband vibration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wideband vibration sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-309188