Process for contamination removal and minority carrier lifetime

Details Process for contamination removal and minority carrier lifetime Process for contamination removal and minority carrier lifetime

1992-11-03

1993-12-21

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 12, 437939, 148DIG24, H01L 21324

Patent

active

052721191

ABSTRACT:
A process for increasing the minority carrier recombination lifetime in a silicon body contaminated with transition metals, expecially iron. The silicon body is stored at a temperature and for a period sufficient to cause metal to diffuse from the bulk of the silicon body to the surface of the silicon body to measurably increase the minority carrier recombination lifetime.

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