Gas control module switch mechanism

Details Gas control module switch mechanism Gas control module switch mechanism

2000-10-06

2002-01-29

Shaver, Kevin (Department: 3754)

Valves and valve actuation

Fluid actuated or retarded

Piston type expansible chamber reciprocating valve actuator

C251S129010, C251S063500, C251S331000, C251S335200

Reexamination Certificate

active

06341758

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a gas control module switch mechanism and particularly a switch mechanism for accurately controlling open and stop of gas flow in a piping system.
2. Description of the Prior Art
Conventional techniques for gas control module switch mechanism generally use metallic diaphragm for sealing gas. However metallic material usually has relative hard property and is difficult to get precise sealing effect desired and may result in gas leaking. In semiconductor industry, a great number of control valves have to be deployed for precisely control gas flow. The gas is usually highly toxic. It is essential and critical to prevent gas leakage. On the other hand, metallic material is easy to wear off and has relatively short useful life span, and often results in increased frequency of repairs and maintenance, and higher maintenance cost.
FIG. 1
shows a conventional technique. There is a valve body A
5
which has a gas inlet A
3
and a gas outlet A
4
. The gas inlet A
3
is engaged with and surrounded by a replaceable valve seat A
1
which includes a round sealing barrel A
11
and a seal member A
13
. The sealing barrel A
11
and seal member A
13
are both machining parts. After using for a period of time, the seal member A
13
and a metal seal A
2
will be worn off because of constant friction between each other and need replacement. For replacing the valve seat A
1
and metal seal A
2
, the valve body A
5
, cylinder A
6
and brake linkage bar A
7
should be disassembled. It is very time consuming and further increases maintenance cost. As a result, this technique has the disadvantages of poorer sealing effect, increased cost in consumption materials and maintenance, and more production time loss.
The main problem of the conventional structure mentioned above results from complicated design. If the disassembly of the structure were limited to only the valve body A
5
, or cylinder A
6
and brake linkage bar A
7
, replacement of parts related to sealing may all be done at one time. Maintenance cost may be greatly reduced. The whole structure will also be simplified and may result in lower production and machining costs.
SUMMARY OF THE INVENTION
The present invention aims at using relative soft material and improved structure to resolve the problems incurred to conventional techniques for achieving the following objects:
1. to increase useful life of consumption materials and reduce maintenance frequency,
2. to simplify design and lower production cost,
3. to make machining easier and reduce machining defects,
4. to make assembly work simpler and make maintenance faster at a lower cost.


REFERENCES:
patent: 1783281 (1930-12-01), Cox
patent: 2605991 (1952-08-01), Kaye
patent: 2654559 (1953-10-01), Franck
patent: 5186434 (1993-02-01), Nishimura et al.
patent: 5295662 (1994-03-01), Yamaji et al.
patent: 5335691 (1994-08-01), Kolenc

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