Charged particle system and a method for measuring image...

Details Charged particle system and a method for measuring image... Charged particle system and a method for measuring image...

2008-05-13

2008-05-13

Berman, Jack (Department: 2881)

Radiant energy

Means to align or position an object relative to a source or...

C250S305000, C250S306000, C250S307000, C250S492200, C250S492300

Reexamination Certificate

active

07372047

ABSTRACT:
A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

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German Office Action issued in corresponding German Application No. 10 2005 002 537.4, dated Dec. 1, 2006.

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