Exchangeable object handling apparatus, lithographic...

Details Exchangeable object handling apparatus, lithographic... Exchangeable object handling apparatus, lithographic...

2008-07-01

2008-07-01

Kim, Peter B (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S053000

Reexamination Certificate

active

07394525

ABSTRACT:
The present invention provides a lithographic apparatus including an illumination system configured to condition a radiation beam; a patterning device support constructed to support a patterning device, the patterning device placed on the patterning device support being capable of imparting the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table constructed to hold a substrate; a projection system configured to project the patterned radiation beam onto a target portion of the substrate, and a patterning device handling apparatus, including a single robot for exchanging a patterning device with the patterning device support and a loading station, wherein the robot includes a first holding device configured to hold a patterning device in a first holding position and a second holding device configured to hold a patterning device in a second holding position. Such single robot makes a rapid and accurate exchange of patterning devices possible.

REFERENCES:
patent: 2004/0019408 (2004-01-01), del Puerto et al.
patent: 2004/0041148 (2004-03-01), Shulman et al.

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