Pressure gauge for organic materials

Details Pressure gauge for organic materials Pressure gauge for organic materials

2008-01-29

2008-01-29

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C324S610000

Reexamination Certificate

active

07322248

ABSTRACT:
A vacuum gauge of the Pirani type for measuring the pressure of vaporized organic or inorganic material used in forming a layer of a device, comprising: an extended filament having a thickness of 5 microns or less and having a temperature coefficient of resistance greater than 0.0035/° C., the filament being subject to the vaporized organic or inorganic material; means for applying a current to the filament so that the temperature of the filament is less than 650° C. so as not to degrade the molecular structure of the organic material; and a structure responsive to a change in resistance or a change in current to determine heat loss from the filament, which is a function of the pressure of the vaporized organic or inorganic material.

REFERENCES:
patent: 4995264 (1991-02-01), Stocker et al.
patent: 5033306 (1991-07-01), Tamura
patent: 5633465 (1997-05-01), Kaufmann et al.
patent: 6727709 (2004-04-01), Jeong et al.
patent: 6784605 (2004-08-01), Sakai et al.
patent: 2002/0163345 (2002-11-01), Jeong et al.

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