Apparatus to passivate inductively or capacitively coupled...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means

Reexamination Certificate

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Details

C257S510000, C257S521000, C257SE21546

Reexamination Certificate

active

07397105

ABSTRACT:
A deep n-well is formed beneath the area of a capacitor structure. The use of a deep n-well lessens the parasitic capacitance by placing a diode in series with the interlayer dielectric cap. The deep n-well also reduces substrate noise. Once the n-well is implanted and annealed, a cross hatch of shallow trench isolation is patterned over the n-well. The shallow trench isolation reduces and confines the inductively and/or capacitively coupled surface currents to small areas that are then isolated from the rest of the chip.

REFERENCES:
patent: 6306720 (2001-10-01), Ding
patent: 2004/0195650 (2004-10-01), Yang et al.
patent: 2005/0023639 (2005-02-01), Yeh et al.

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