Method of manufacturing micro-electromechanical device...

Details Method of manufacturing micro-electromechanical device... Method of manufacturing micro-electromechanical device...

Filed on

2008-03-04

Date issued

2008-03-04

Examiner

Phan, Tim (Department: 3729)

Patent Class

Metal working

SubClass

Method of mechanical manufacture

SubSubClass

Electrical device making

Other Related Categories

C029S622000, C029S825000, C029S874000, C029S890100, C310S307000, C333S101000, C333S262000, C335S078000, C347S020000, C347S054000, C347S068000

Type

Reexamination Certificate

Status

active

Patent number

07337532

Description

ABSTRACT:
A method of manufacturing a micro-electromechanical device is provided. The method comprises providing a substrate incorporating drive circuitry, and forming a drive member, a motion-transmitting member and a working member on the substrate as discrete components. The drive member is formed to have an electrical circuit in electrical contact with the drive circuitry for receiving an electrical signal therefrom, a fixed end fast with the substrate and a free end arranged to be displaced relative to the substrate on receipt of the electrical signal by the electrical circuit. The motion-transmitting member is formed to be fast with the free end of the drive member so that the motion-transmitting member is displaced together with the free end. The working member is formed to be fast with the motion-transmitting member so that the working member is displaced with the motion-transmitting member to perform work.

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