System and method for removing film from planar substrate...

Details System and method for removing film from planar substrate... System and method for removing film from planar substrate...

2008-01-15

2008-01-15

Ackun, Jr., Jacob K. (Department: 3728)

Abrading

Abrading process

Utilizing fluent abradant

C451S082000

Reexamination Certificate

active

07318769

ABSTRACT:
A system for removing film from a planar substrate includes a shuttle which transports a film-coated substrate through a film removal station to a rotation station. At the rotation station, the substrate is removed from the shuttle and rotated to a new orientation. After being repositioned on the shuttle, the substrate is transported by the shuttle through a second film removal station.

REFERENCES:
patent: 5163253 (1992-11-01), Carpenter, Jr.
patent: 6340640 (2002-01-01), Nishimoto et al.
patent: 6423565 (2002-07-01), Barth et al.

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