Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate
2008-01-22
2008-01-22
Turner, Samuel A. (Department: 2877)
Optics: measuring and testing
By light interference
For dimensional measurement
C356S504000, C356S511000
Reexamination Certificate
active
07321431
ABSTRACT:
Methods and systems are disclosed for analyzing a scanning interferometry signal. A scanning interferometry signal is provided that is produced by a scanning interferometer for a first location of a test object (e.g., a sample having a thin film). A model function of the scanning interferometry signal is provided which is produced by the scanning interferometer. The model function is parametrized by one or more parameter values. The model function is fit to the scanning interferometry signal for each of a series of shifts in scan position between the model function and the scanning interferometry signal by varying the parameter values. Information is determined about the test object (e.g., a surface height or height profile, and/or a thickness or thickness profile for a thin film in the test object) at the first location based on the fitting.
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Fish & Richardson P.C.
Turner Samuel A.
Zygo Corporation
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