Micro-oscillator, semiconductor device and communication...

Details Micro-oscillator, semiconductor device and communication... Micro-oscillator, semiconductor device and communication...

2008-04-01

2008-04-01

Pascal, Robert (Department: 2817)

Oscillators

Solid state active element oscillator

Transistors

C331S154000, C333S186000, C333S197000, C310S309000

Reexamination Certificate

active

07352254

ABSTRACT:
A micro-oscillator is provided. In an example, the micro-oscillator applied to a signal filter and the like, ground capacitance thereof is reduced to control the loss of signal output. An oscillator element having a beam facing lower electrodes and to be electrostatically driven is formed on a substrate, and a wire width W1of a DC bias feeder wire connected to the beam is formed to be narrower than a width of the beam.

REFERENCES:
patent: 4137511 (1979-01-01), Jones
patent: 6713938 (2004-03-01), Nguyen
patent: 2005/0140467 (2005-06-01), Duwel et al.
patent: 2007/0052497 (2007-03-01), Tada
Clark T.-C. Nguyen, “Frequency-Selective MEMS for Miniaturized Low-Power Communications Devices”, IEEE Transactions of Microwave Theory and Techniques, vol. 47, No. 8, Aug. 1999, pp. 1486-1503.
Frank D. Bannon III et al. “High-Q HF Microelectromechanical Filters”, IEEE Journal of Solid-state Circuits, vol. 35, No. 4, Apr. 2000, pp. 512-526.

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