Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-05-13
2008-05-13
Fuller, Rodney (Department: 2862)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S046000, C355S067000, C355S077000
Reexamination Certificate
active
07372543
ABSTRACT:
An exposure apparatus includes a plurality of projection optical systems, each of which has optical elements arranged in an optical path between a first surface and a second surface and forms a radiation pattern from the first surface onto an exposure field on the second surface via the optical elements. The apparatus also includes a movable portion disposed in the side of the second surface with respect to the plurality of projection optical systems, which holds an object to be moved relative to the exposure field in a first direction during a scanning exposure of the object with the radiation patterns. Each of the plurality of projection optical systems is telecentric on the side of the second surface, and the exposure fields are arranged at different positions in a second direction crossing the first direction.
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Chiba Hiroshi
Kato Kinya
Kato Masaki
Kumazawa Masato
Shirasu Hiroshi
Fuller Rodney
Nikon Corporation
Oliff & Berridg,e PLC
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