Verification of non-recurring defects in pattern inspection

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition

Reexamination Certificate

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C382S145000, C382S147000

Reexamination Certificate

active

07317522

ABSTRACT:
A system and method for verifying defects in electrical circuit patterns including supplying a plurality of like electrical circuit patterns to a defect verification assembly after identification of candidate defects at an automated inspection assembly; verifying selected candidate defects as being one of: an actual defect, other than an actual defect; and marking a candidate defect in response to a recurrence of a given candidate defect at substantially corresponding locations on at least two electrical circuit patterns.

REFERENCES:
patent: 4247203 (1981-01-01), Levy et al.
patent: 4628531 (1986-12-01), Okamoto et al.
patent: 5204912 (1993-04-01), Schimanski
patent: 5369431 (1994-11-01), Levy et al.
patent: 5699447 (1997-12-01), Alumot et al.
patent: 6366690 (2002-04-01), Smilansky et al.
patent: 6975754 (2005-12-01), Hiroi et al.
patent: 2002/0114506 (2002-08-01), Hiroi et al.
patent: 2003/0020905 (2003-01-01), Savareigo et al.
Brochure, InFinex™ 3000 Series:, Orbotech Ltd., Yavne, Israel, Aug. 2004, 4 pages.
Brochure, InSpire—9000™ Automated Optical Inspection System, Orbotech Ltd., Yavne, Israel, Feb. 1995, 5 pages.
Brochure, Spiron—8800 AVIP™, AOI with Automatic Verification-In-Parallel, Orbotech Ltd., Yavne, Israel, Jul. 2004, 4 pages.
Brochure, Vision—300AP™ AOI Series, Orbotech Ltd., Yavne, Israel, Apr. 2002, 4 pages.
Brochure, Discovery™ 6 AOI System, Orbotech Ltd., Yavne, Israel, Sep. 2004, 4 pages.
Brochure, VRS-5™ Series, Orbotech Ltd., Yavne, Israel, Feb. 2003, 2 pages.

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