Liquid removal in a method and device for irradiating spots...

Details Liquid removal in a method and device for irradiating spots... Liquid removal in a method and device for irradiating spots...

2008-04-15

2008-04-15

Berman, Jack I. (Department: 2881)

Radiant energy

Irradiation of objects or material

C250S216000, C250S234000, C250S235000, C359S619000, C359S581000, C369S044140, C369S112040, C430S311000, C430S322000

Reexamination Certificate

active

07358507

ABSTRACT:
For irradiating a layer (3) a radiation beam (7) is directed and focused to a spot (11) on the layer (3), relative movement of the layer (3) relative to the optical element (59) is caused so that, successively, different portions of the layer (3) are irradiated and an interspace (53) between a surface of the optical element (59) nearest to the layer (3) is maintained. Furthermore, at least a portion of the interspace (53) through which the radiation irradiates the spot (11) on the layer (3) is maintained filled with a liquid (91). By directing a gas flow (71-73) to a surface zone (74) of the layer (3), liquid (91) is reliably prevented from passing that surface zone (74), without causing damage to the layer (3). The liquid (91) is drawn away from the layer (3) in the vicinity of the surface zone (74).

REFERENCES:
patent: 6369957 (2002-04-01), Ishida
patent: 7125652 (2006-10-01), Lyons et al.
patent: 2002/0020821 (2002-02-01), Van Santen et al.
patent: 09153233 (1997-06-01), None
patent: 10255319 (1998-09-01), None
patent: WO9949504 (1999-09-01), None
patent: WO0213194 (2002-02-01), None

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