Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2008-05-13
2008-05-13
Paladini, Albert W. (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S028000
Reexamination Certificate
active
07373213
ABSTRACT:
A management apparatus which manages a parameter for an industrial device acquires AGA measurement results obtained by operating the industrial device with an operation job parameter value and non-operation job parameter value. An inspection apparatus acquires an “inspection result” obtained by inspecting the result of operating the industrial device in the operation job. A change in inspection result upon a change in parameter value is estimated on the basis of the AGA measurement result and inspection result. A variable which minimizes (extreme) both or at least one of the sensitivity (slope) of the inspection result upon a change in parameter value and variations (3σ) in inspection result between objects to be processed (e.g., wafers) is set as an optimal parameter.
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Ina Hideki
Matsumoto Takahiro
Oishi Satoru
Sentoku Koichi
Suzuki Takehiko
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Paladini Albert W.
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