Lithographic apparatus and device manufacturing method...

Details Lithographic apparatus and device manufacturing method... Lithographic apparatus and device manufacturing method...

2008-05-06

2008-05-06

Lee, Diane I. (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C356S399000, C250S548000

Reexamination Certificate

active

07369214

ABSTRACT:
A system and method include an object supported on a moveable support, an optical system that transmits radiation onto the object, a support having an aperture therethrough, a sensor system coupled to the support, and a control system coupled to the sensor system and the moveable support. The sensor system is arranged with respect to the aperture to measure a surface of the object and send measurement signals to the control system, such that the control system generates control signals received and used by the moveable support to ensure that the surface of the object receiving light transmitted by the optical system through the aperture is in a focus plane of the optical system.

REFERENCES:
patent: 4550592 (1985-11-01), Dechape
patent: 4953388 (1990-09-01), Barada
patent: 5825043 (1998-10-01), Suwa
patent: 6633050 (2003-10-01), Lyons
patent: 6979833 (2005-12-01), Lyons
patent: 6984836 (2006-01-01), Lyons
patent: 2004/0118183 (2004-06-01), Gajdeczko et al.
patent: 2004/0118184 (2004-06-01), Violette
patent: 2005/0044963 (2005-03-01), Lyons
Joseph Lyons, U.S. Appl. No. 11/256,938, filed Oct. 25, 2005, entitled “Virtual Gauging Method for Use in Lithographic Processing”.

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