Ion-implanting apparatus, ion-implanting method, and device...

Details Ion-implanting apparatus, ion-implanting method, and device... Ion-implanting apparatus, ion-implanting method, and device...

2008-04-29

2008-04-29

Wells, Nikita (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S398000

Reexamination Certificate

active

07365346

ABSTRACT:
An ion-implanting apparatus and method can dynamically control a beam current value with time and does not change energy. This ion-implanting apparatus controls a dynamic change in beam current value with time by giving feedback on the beam current value measured with a beam current measuring device.

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