Substrate processing apparatus and substrate transporting...

Details Substrate processing apparatus and substrate transporting... Substrate processing apparatus and substrate transporting...

2008-07-01

2008-07-01

Markoff, Alexander (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

Automatic controls

C134S061000, C134S082000, C134S902000

Reexamination Certificate

active

07392812

ABSTRACT:
The invention provides a substrate processing apparatus including a processing tank for processing substrates, a transporting path provided along the processing tank, a substrate transporting device moving along the transporting path for transporting the substrates, wherein the substrate processing apparatus and the substrate transporting device mounted thereto may realize the improvement of the throughput of substrate processing without increasing the area for installing the substrate processing apparatus. There are provided at least two substrate transporting devices that are capable of moving on the identical transporting path. The movable ranges of the respective substrate transporting devices for transporting the substrates are overlapped with respect to each other. When transportation of the substrates is required simultaneously at a plurality of processing tanks in scheduling data prepared by a scheduler, the scheduling data is determined by referencing substrate transportation sharing conditions.

REFERENCES:
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patent: 6161969 (2000-12-01), Kimura et al.
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patent: 2002/0192055 (2002-12-01), Kobayachi et al.
patent: 62-078828 (1987-04-01), None
patent: 7-22144 (1995-03-01), None
patent: 10-172939 (1998-06-01), None
patent: 2002-172367 (2002-06-01), None
patent: WO 0154187 (2001-07-01), None

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