MEMS vascular sensor

Details MEMS vascular sensor MEMS vascular sensor

2008-05-06

2008-05-06

Williams, Hezron (Department: 2856)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

By loading of specimen

C073S204230

Reexamination Certificate

active

07367237

ABSTRACT:
A micromachined sensor for measuring vascular parameters, such as fluid shear stress, includes a substrate having a front-side surface, and a backside surface opposite the front-side surface. The sensor includes a diaphragm overlying a cavity etched within the substrate, and a heat sensing element disposed on the front-side surface of the substrate and on top of the cavity and the diaphragm. The heat sensing element is electrically couplable to electrode leads formed on the backside surface of the substrate. The sensor includes an electronic system connected to the backside surface and configured to measure a change in heat convection from the sensing element to surrounding fluid when the sensing element is heated by applying an electric current thereto, and further configured to derive from the change in heat convection vascular parameters such as the shear stress of fluid flowing past the sensing element.

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