Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate
2011-03-29
2011-03-29
Lindsay, Jr., Walter L (Department: 2812)
Semiconductor device manufacturing: process
With measuring or testing
C257SE21521, C257SE21529
Reexamination Certificate
active
07915055
ABSTRACT:
The present invention provides a manufacturing technique of a semiconductor device that reduces fluctuation of electric characteristic and a working size of a semiconductor device and can manufacture semiconductor devices at high quality and at high yield. In a semiconductor device manufacturing system, a control method for a manufacturing process of a semiconductor device having a function (a data collecting unit) of collecting examination data at a plurality of examining steps including an examining step of setting a length of a measurement region in a wiring direction to at least 10 times a wire width to measure the wire width and an examining step of examining the wire width, a function (a data analyzing unit) of generating a prediction model of electric characteristic or working size of a semiconductor device using the examination data to generate a control model from the prediction model, and a function (a process control unit) of properly controlling processing conditions for a control process based upon examination data of the plurality of examining steps in the manufacturing process of a semiconductor device and the control model is realized.
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Izawa Masaru
Kurihara Masaru
Tanaka Junichi
Antonelli, Terry Stout & Kraus, LLP.
Chang Leonard
Hitachi , Ltd.
Lindsay, Jr. Walter L
Renesas Electronics Corporation
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