TiO 2 -containing silica glass

Details TiO 2 -containing silica glass TiO 2 -containing silica glass

2011-08-02

2011-08-02

Lorengo, Jerry (Department: 1731)

Compositions: ceramic

Ceramic compositions

Glass compositions, compositions containing glass other than...

C501S056000, C501S057000

Reexamination Certificate

active

07989378

ABSTRACT:
The present invention is to provide a TiO2—SiO2glass having suitable thermal expansion properties as an optical member of an exposure tool for EUVL. The present invention relates to a TiO2-containing silica glass having a temperature, at which a coefficient of thermal expansion is 0 ppb/° C., falling within the range of 23±4° C. and a temperature width, in which a coefficient of thermal expansion is 0±5 ppb/° C., of 5° C. or more.

REFERENCES:
patent: 2326059 (1943-08-01), Nordberg
patent: 5970751 (1999-10-01), Maxon et al.
patent: 7294595 (2007-11-01), Iwahashi et al.
patent: 7410922 (2008-08-01), Iwahashi et al.
patent: 7419924 (2008-09-01), Koike et al.
patent: 7429546 (2008-09-01), Iwahashi et al.
patent: 7462574 (2008-12-01), Iwahashi et al.
patent: 7538052 (2009-05-01), Iwahashi et al.
patent: 2002/0157421 (2002-10-01), Ackerman et al.
patent: 2005/0032622 (2005-02-01), Dawes et al.
patent: 2005/0272590 (2005-12-01), Iwahashi et al.
patent: 2006/0179879 (2006-08-01), Ellison et al.
patent: 2007/0137252 (2007-06-01), Maxon et al.
patent: 2007/0207911 (2007-09-01), Koike et al.
patent: 2007/0263281 (2007-11-01), Maxon et al.
patent: 2009/0122281 (2009-05-01), Iwahashi et al.
patent: 2009/0242387 (2009-10-01), Koike et al.
patent: 60176945 (1985-09-01), None
patent: 2005-104820 (2005-04-01), None
patent: WO 98/52879 (1998-11-01), None
patent: WO 99/15468 (1999-04-01), None
patent: WO 2004/089836 (2004-10-01), None
patent: WO 2004/089839 (2004-10-01), None
patent: WO 2005/066090 (2005-07-01), None
U.S. Appl. No. 12/862,174, filed Aug. 24, 2010, Koike, et al.
U.S. Appl. No. 12/870,156, filed Aug. 27, 2010, Koike, et al.
U.S. Appl. No. 12/869,035, filed Aug. 26, 2010, Koike, et al.
U.S. Appl. No. 12/868,900, filed Aug. 26, 2010, Koike, et al.

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