Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2008-07-15
2008-07-15
Ham, Seungsook (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C310S31300R, C257S416000
Reexamination Certificate
active
07400219
ABSTRACT:
A surface acoustic wave (SAW) device includes at least an IC region and a SAW element region. A semiconductor element layer and wiring layer is located in the IC region, and the semiconductor element layer has a semiconductor element and an element insulating film. The wiring layer is formed by stacking wiring to connect with the semiconductor element and a wiring insulating film extending to the SAW region. The semiconductor element layer further includes a piezoelectric thin film formed above the wiring insulating film, and in the SAW element region, a SAW element is formed on the piezoelectric thin film equipped with an IDT electrode provided with a plurality of electrode fingers, and at least one layer of layer thickness adjusting films having linear shapes and arranged in parallel to and with the same pitch as the electrode fingers of the IDT electrode.
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Furuhata Makoto
Sato Hisakatsu
Ham Seungsook
Oliff & Berridg,e PLC
Seiko Epson Corporation
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