Wave transmission lines and networks – Plural channel systems – Having branched circuits
Reexamination Certificate
2008-07-29
2008-07-29
Lee, Benny (Department: 2817)
Wave transmission lines and networks
Plural channel systems
Having branched circuits
C333S262000
Reexamination Certificate
active
07405635
ABSTRACT:
It is to provide an MEMS switch easy to manufacture, microscopic, and capable of obtaining a sufficient ON/OFF capacitance change ratio.An MEMS switch includes a substrate46, a conductive beam42formed on a surface of the substrate, and three-layer structure beams B1and B2formed on the surface of the substrate and disposed to be opposed to the conductive beam. The MEMS switch is characterized in that: each of the three-layer structure beams includes a first conductive layer38, 40, a second conductive layer30, 32and a dielectric layer34, 36sandwiched between the first conductive layer and the second conductive layer; the first conductive layer is opposed to the conductive beam42; at least one of the conductive beam42and the three-layer structure beams is displaced on a plane parallel to the substrate46due to an electrostatic force so that the conductive beam42and the first conductive layer38, 40can come into contact with each other; and a conductive path is formed between the conductive beam42and the second conductive layer30, 32when the conductive beam42and the first conductive layer are in contact with each other.
REFERENCES:
patent: 6218911 (2001-04-01), Kong et al.
patent: 6452124 (2002-09-01), York et al.
patent: 6472962 (2002-10-01), Guo et al.
patent: 6525396 (2003-02-01), Melendez et al.
patent: 6891454 (2005-05-01), Naito et al.
patent: 6982616 (2006-01-01), Nakanishi et al.
patent: 2003-71798 (2003-03-01), None
Park et al., “Electroplated RF MEMS Capacitive Switches”, 2000, pp. 639-644 (Cited on ISR & in Specification, English Text).
Hashimura Akinori
Naito Yasuyuki
Nakamura Kunihiko
Nakanishi Yoshito
Lee Benny
Matsushita Electric - Industrial Co., Ltd.
Pearne & Gordon LLP
Wong Alan
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