Projection exposure apparatus, cleaning and maintenance...

Details Projection exposure apparatus, cleaning and maintenance... Projection exposure apparatus, cleaning and maintenance...

2011-04-26

2011-04-26

Glick, Edward J (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07932992

ABSTRACT:
A projection exposure apparatus that exposes a substrate with a liquid interposed between a surface of the substrate and an optical element on the substrate side of a projection optical system; includes liquid supply and discharge mechanisms, which supply the liquid via a liquid supply tube as they recover the liquid via a liquid recovery tube, and an adhesion preventing mechanism that prevents an adhesion of impurities on member forming a flow path for the liquid.

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