Radiant energy imager using null switching

Radiant energy – Invisible radiant energy responsive electric signalling – Infrared responsive

Reexamination Certificate

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Reexamination Certificate

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07868293

ABSTRACT:
In some aspects, the present invention embodies both the method and apparatus for converting a pattern of irradiation to a visible image. An embodiment of the present invention provides an array of micro-electro-mechanical sensors with each sensor includes a deflectable micro-cantilever, responsive to absorbed incident radiation and to an applied repulsive electrostatic field. In an aspect, the sensor device also includes a null-sensing circuit coupled to a switch contact on or near the substrate, which senses when the micro-cantilever reaches its null location, by electrical connection with an upper switch contact on the micro-cantilever. Other embodiments are also described.

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patent: 6420706 (2002-07-01), Lurie et al.
patent: 6876482 (2005-04-01), DeReus
patent: 7116462 (2006-10-01), Ikeda
patent: 2003/0116417 (2003-06-01), DeReus
patent: 2007/0024951 (2007-02-01), Mochizuki et al.
patent: 2007/0074569 (2007-04-01), Engler et al.

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