Thin-film capacitor

Details Thin-film capacitor Thin-film capacitor

2011-03-01

2011-03-01

Thomas, Eric (Department: 2835)

Electricity: electrical systems and devices

Electrostatic capacitors

Fixed capacitor

C361S311000

Reexamination Certificate

active

07898792

ABSTRACT:
A thin-film capacitor and a method for making the thin-film capacitor having a structure that can prevent vertical stress acting on outer connecting terminals, such as bumps, from concentrating on electrode layers, and capable of easily increasing the equivalent series resistance to a desired value. The thin-film capacitor includes a substrate, a capacitor unit disposed above the substrate and composed of at least one dielectric thin film and two electrode layers, a protective layer covering at least part of the capacitor unit, a lead conductor electrically connected to one of the electrode layers of the capacitor unit, and a bump disposed above the lead conductor. The lead conductor includes a connecting part disposed in an opening in the protective layer and electrically connected to one of the electrode layers of the capacitor unit, and a wiring part extending over the protective layer. The bump is disposed above the wiring part.

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