Split field inspection system using small catadioptric...

Details Split field inspection system using small catadioptric... Split field inspection system using small catadioptric...

2011-06-07

2011-06-07

Schwartz, Jordan M. (Department: 2873)

Optical: systems and elements

Single channel simultaneously to or from plural channels

C359S629000, C359S634000, C356S611000, C356S237200

Reexamination Certificate

active

07957066

ABSTRACT:
A system for inspecting a specimen is provided. The system includes an illumination subsystem configured to produce a plurality of channels of light energy, each channel of light energy produced having differing characteristics (type, wavelength, etc.) from at least one other channel of light energy. Optics are configured to receive the plurality of channels of light energy and combine them into a spatially separated combined light energy beam and direct it toward the specimen. A data acquisition subsystem comprising at least one detector is provided, configured to separate reflected light energy into a plurality of received channels corresponding to the plurality of channels of light energy and detect the received channels.

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patent: 7307783 (2007-12-01), Armstrong et al.
patent: 2009/0309049 (2009-12-01), Van Dijk et al.

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