Film forming apparatus and method of film formation

Details Film forming apparatus and method of film formation Film forming apparatus and method of film formation

2011-06-07

2011-06-07

Hassanzadeh, Parviz (Department: 1716)

Coating apparatus

Projection or spray type

Applying solid particulate material

C118S300000, C118S050000, C427S475000

Reexamination Certificate

active

07954448

ABSTRACT:
A film forming apparatus includes a film forming chamber for performing a film formation; an exhaust unit connected to the film forming chamber to discharge a gas out of the film forming chamber; a holder provided in the film forming chamber to hold a process-objective material; a jetting nozzle provided in the film forming chamber on which a jetting port is formed in a slit shape, and jetting an aerosol containing particulate material to form a film made of the particulate material on the process-objective material; and a shielding member provided at a side of the jetting port in a longitudinal direction of the jetting port to cover a side of a jet flow of the aerosol jetted from the jetting port. Accordingly, it is possible to suppress a turbulence of a flow of the aerosol due to an exhaust flow, and to form the film uniformly.

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European Patent Office, European Search Report for Related Application No. EP 06017584, dated Dec. 20, 2006.

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