Material or article handling – Apparatus for moving material between zones having different...
Reexamination Certificate
2011-08-02
2011-08-02
Keenan, James (Department: 3652)
Material or article handling
Apparatus for moving material between zones having different...
C414S939000
Reexamination Certificate
active
07988399
ABSTRACT:
In a system having a number of semiconductor processing modules sharing a common vacuum environment, a mid-entry load lock is provided to permit insertion and removal of wafers into the vacuum environment at a point between various other robotic handlers, process modules, and load locks. This arrangement permits increased flexibility in scheduling when multiple wafers are processed concurrently.
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Brooks Automation Inc.
Keenan James
Perman & Green LLP
Pickreign Richard
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