Method and device for producing granulated polycrystalline...

Details Method and device for producing granulated polycrystalline... Method and device for producing granulated polycrystalline...

2011-04-12

2011-04-12

Hendrickson, Stuart (Department: 1736)

Chemistry of inorganic compounds

Silicon or compound thereof

Elemental silicon

C427S008000, C422S146000

Reexamination Certificate

active

07922990

ABSTRACT:
A fluidized bed process for the production of polycrystalline silicon granules supplies, in addition to reaction gas, a gas containing 99.5 to 95 mol. percent hydrogen and 0.5 to 5 mol. percent gaseous silicon compounds, and the reactor wall is maintained at the same or a higher temperature than the reaction zone, such that the deposition of silicon on reactor internals is minimized.

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Patent Abstract Corresponding to DE 19948395 A1.
Patent Abstract Corresponding to DE 4327308 C2.
Patent Abstract Corresponding to DE 3910343 A1.
Patent Abstract Corresponding to JP 6127914.

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