Laser diode array, method of manufacturing same, printer,...

Details Laser diode array, method of manufacturing same, printer,... Laser diode array, method of manufacturing same, printer,...

2011-06-14

2011-06-14

Wilczewski, Mary (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

Including integrally formed optical element

C438S046000, C438S459000, C438S977000, C438S034000, C372S050120, C372S050124, C372S046013

Reexamination Certificate

active

07960195

ABSTRACT:
A method of manufacturing a laser diode array capable of inhibiting electric cross talk is provided. The method of manufacturing a laser diode array includes a processing step of forming a peel layer containing an oxidizable material and a vertical resonator structure over a first substrate sequentially from the first substrate side by crystal growth, and then selectively etching the peel layer and the vertical resonator structure to the first substrate, thereby processing into a columnar shape, a peeling step of oxidizing the peel layer from a side face, and then peeling the vertical resonator structure of columnar shape from the first substrate, and a rearrangement step of jointing a plurality of vertical resonator structures of columnar shape obtained by the peeling step to a surface of a metal layer of a second substrate formed with the metal layer on the surface.

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