Mirror device accommodated by liquid-cooled package

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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Details

C359S291000

Reexamination Certificate

active

07933059

ABSTRACT:
The present invention discloses a mirror device that comprises 1) a mirror element for modulating incident light emitted from a light source and for controlling the reflecting direction of incident light, and 2) a coolant flow channel for containing and flowing a liquid coolant through the flow channel to carry away heat generated in the mirror device.

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