Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2011-07-19
2011-07-19
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
Reexamination Certificate
active
07982857
ABSTRACT:
A stage apparatus PST is provided with a holder PH, which has a substrate holding surface33A that holds a substrate P; a stage52, which supports and moves the holder PH; and a recovery apparatus60, which is disposed in the vicinity of the holder PH and has lyophilic parts3, 5of which at least a part of each is lyophilic, that uses the lyophilic parts3, 5to recover a liquid1. As a result, the infiltration of liquid into the space between the substrate and the holder is prevented, even if performing an exposure treatment by filling the space between a projection optical system and the substrate with the liquid.
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Kohno Hirotaka
Nishii Yasufumi
Shiraishi Kenichi
Kim Peter B
Liu Chia-how Michael
Nikon Corporation
Oliff & Berridg,e PLC
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