Inspection apparatus and inspection method using electron beam

Details Inspection apparatus and inspection method using electron beam Inspection apparatus and inspection method using electron beam

2011-08-16

2011-08-16

Phan, Huy (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

07999565

ABSTRACT:
A visual inspection apparatus and method using the scanning electron microscope are disclosed. An electron beam is scanned repeatedly on a sample, and an inspection and a reference image are generated by the secondary electrons generated from the sample or reflected electrons. From the differential image between the inspection image and the reference image, a defect is determined. The number of pixels in the generated image along the direction of repetitive scanning by the electron beam can be changed.

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