Optical: systems and elements – Having significant infrared or ultraviolet property – Having folded optical path
Reexamination Certificate
2011-01-11
2011-01-11
Allen, Stephone B (Department: 2872)
Optical: systems and elements
Having significant infrared or ultraviolet property
Having folded optical path
C359S364000, C359S708000, C359S727000
Reexamination Certificate
active
07869121
ABSTRACT:
A relatively high NA objective employed for use in imaging a specimen is provided. The objective includes a lens group having at least one focusing lens configured to receive light energy and form an intermediate image, at least one field lens oriented to receive the intermediate image and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy and apply light energy to the specimen. One or more elements may employ an aspheric surface. The objective may provide an uncorrected spectral bandwidth up to approximately 193 to 266 nanometers and numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The field lens may include more than one lens and may be formed of a material different from at least one other lens in the objective.
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Armstrong J. Joseph
Chuang Yung-Ho
Shafer David R.
Allen Stephone B
Chapel Derek S
KLA-Tencor Technologies Corporation
Smyrski Law Group, A P.C.
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