Method for transfer of a thin layer

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Thinning of semiconductor substrate

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C257SE21122

Reexamination Certificate

active

07960248

ABSTRACT:
A method for transferring a thin layer from an initial substrate includes forming an assembly of the initial substrate with one face of a silicone type polymer layer, this face having been treated under an ultraviolet radiation, and processing the initial substrate to form the thin layer on the silicone type polymer layer.

REFERENCES:
patent: 3901423 (1975-08-01), Hillberry et al.
patent: 3915757 (1975-10-01), Engel
patent: 3957107 (1976-05-01), Altoz et al.
patent: 3993909 (1976-11-01), Drews et al.
patent: 4006340 (1977-02-01), Gorinas
patent: 4028149 (1977-06-01), Deines et al.
patent: 4039416 (1977-08-01), White
patent: 4074139 (1978-02-01), Pankove
patent: 4107350 (1978-08-01), Berg et al.
patent: 4108751 (1978-08-01), King
patent: 4121334 (1978-10-01), Wallis
patent: 4170662 (1979-10-01), Weiss et al.
patent: 4179324 (1979-12-01), Kirkpatrick
patent: 4244348 (1981-01-01), Wilkes
patent: 4252837 (1981-02-01), Auton
patent: 4254590 (1981-03-01), Eisele et al.
patent: 4274004 (1981-06-01), Kanai
patent: 4324631 (1982-04-01), White et al.
patent: 4346123 (1982-08-01), Kaufmann
patent: 4361600 (1982-11-01), Brown
patent: 4368083 (1983-01-01), Bruel et al.
patent: 4412868 (1983-11-01), Brown et al.
patent: 4452644 (1984-06-01), Bruel et al.
patent: 4468309 (1984-08-01), White
patent: 4471003 (1984-09-01), Cann
patent: 4486247 (1984-12-01), Ecer et al.
patent: 4490190 (1984-12-01), Speri
patent: 4500563 (1985-02-01), Ellenberger et al.
patent: 4508056 (1985-04-01), Bruel et al.
patent: 4536657 (1985-08-01), Bruel
patent: 4539050 (1985-09-01), Kramler et al.
patent: 4542863 (1985-09-01), Larson
patent: 4566403 (1986-01-01), Fournier
patent: 4567505 (1986-01-01), Pease
patent: 4568563 (1986-02-01), Jackson et al.
patent: 4585945 (1986-04-01), Bruel et al.
patent: 4630093 (1986-12-01), Yamaguchi et al.
patent: 4684535 (1987-08-01), Heinecke et al.
patent: 4704302 (1987-11-01), Bruel et al.
patent: 4717683 (1988-01-01), Parrillo et al.
patent: 4764394 (1988-08-01), Conrad
patent: 4837172 (1989-06-01), Mizuno et al.
patent: 4846928 (1989-07-01), Dolins et al.
patent: 4847792 (1989-07-01), Barna et al.
patent: 4853250 (1989-08-01), Boulos et al.
patent: 4887005 (1989-12-01), Rough et al.
patent: 4894709 (1990-01-01), Phillips et al.
patent: 4904610 (1990-02-01), Shyr
patent: 4920396 (1990-04-01), Shinohara et al.
patent: 4929566 (1990-05-01), Beitman
patent: 4931405 (1990-06-01), Kamijo et al.
patent: 4948458 (1990-08-01), Ogle
patent: 4952273 (1990-08-01), Popov
patent: 4956698 (1990-09-01), Wang
patent: 4960073 (1990-10-01), Suzuki et al.
patent: 4975126 (1990-12-01), Margail et al.
patent: 4982090 (1991-01-01), Wittmaack
patent: 4996077 (1991-02-01), Moslehi et al.
patent: 5013681 (1991-05-01), Godbey et al.
patent: 5015353 (1991-05-01), Hubler et al.
patent: 5034343 (1991-07-01), Rouse et al.
patent: 5036023 (1991-07-01), Dautremont-Smith et al.
patent: 5110748 (1992-05-01), Sarma
patent: 5120666 (1992-06-01), Gotou
patent: 5138422 (1992-08-01), Fujii et al.
patent: 5198371 (1993-03-01), Li
patent: 5200805 (1993-04-01), Parsons et al.
patent: 5232870 (1993-08-01), Ito et al.
patent: 5234535 (1993-08-01), Beyer et al.
patent: 5242863 (1993-09-01), Xiang-Zheng et al.
patent: 5250446 (1993-10-01), Osawa et al.
patent: 5256581 (1993-10-01), Foerstner et al.
patent: 5259247 (1993-11-01), Bantien
patent: 5300788 (1994-04-01), Fan et al.
patent: 5310446 (1994-05-01), Konishi et al.
patent: 5400458 (1995-03-01), Rambosek
patent: 5405802 (1995-04-01), Yamagata et al.
patent: 5413951 (1995-05-01), Ohori et al.
patent: 5494835 (1996-02-01), Bruel
patent: 5524339 (1996-06-01), Gorowitz et al.
patent: 5559043 (1996-09-01), Bruel
patent: 5567654 (1996-10-01), Beilstein, Jr. et al.
patent: 5611316 (1997-03-01), Oshima et al.
patent: 5618739 (1997-04-01), Takahashi et al.
patent: 5622896 (1997-04-01), Knotter et al.
patent: 5633174 (1997-05-01), Li
patent: 5661333 (1997-08-01), Bruel et al.
patent: 5714395 (1998-02-01), Bruel
patent: 5804086 (1998-09-01), Bruel
patent: 5811348 (1998-09-01), Matsushita et al.
patent: 5817368 (1998-10-01), Hashimoto
patent: 5854123 (1998-12-01), Sato et al.
patent: 5863830 (1999-01-01), Bruel et al.
patent: 5863832 (1999-01-01), Doyle et al.
patent: 5877070 (1999-03-01), Goesele et al.
patent: 5882987 (1999-03-01), Srikrishnan
patent: 5897331 (1999-04-01), Sopori
patent: 5909627 (1999-06-01), Egloff
patent: 5920764 (1999-07-01), Hanson et al.
patent: 5953622 (1999-09-01), Lee et al.
patent: 5966620 (1999-10-01), Sakaguchi et al.
patent: 5981400 (1999-11-01), Lo
patent: 5985412 (1999-11-01), Gösele
patent: 5993677 (1999-11-01), Biasse et al.
patent: 5994207 (1999-11-01), Henley et al.
patent: 6010591 (2000-01-01), Gösele
patent: 6013563 (2000-01-01), Henley et al.
patent: 6013954 (2000-01-01), Hamajima
patent: 6020252 (2000-02-01), Aspar et al.
patent: 6033974 (2000-03-01), Henley et al.
patent: 6048411 (2000-04-01), Henley et al.
patent: 6054363 (2000-04-01), Sakaguchi et al.
patent: 6054370 (2000-04-01), Doyle
patent: 6057212 (2000-05-01), Chan et al.
patent: 6071795 (2000-06-01), Cheung et al.
patent: 6096433 (2000-08-01), Kikuchi et al.
patent: 6103597 (2000-08-01), Aspar et al.
patent: 6103599 (2000-08-01), Henley et al.
patent: 6118181 (2000-09-01), Merchant et al.
patent: 6127199 (2000-10-01), Inoue
patent: 6146979 (2000-11-01), Henley et al.
patent: 6150239 (2000-11-01), Goesele et al.
patent: 6159323 (2000-12-01), Joly et al.
patent: 6190998 (2001-02-01), Bruel et al.
patent: 6198159 (2001-03-01), Hosoma et al.
patent: 6200878 (2001-03-01), Yamagata et al.
patent: 6204079 (2001-03-01), Aspar et al.
patent: 6225190 (2001-05-01), Bruel et al.
patent: 6225192 (2001-05-01), Aspar et al.
patent: 6271101 (2001-08-01), Fukunaga
patent: 6294478 (2001-09-01), Shkaguchi et al.
patent: 6303468 (2001-10-01), Aspar et al.
patent: 6316333 (2001-11-01), Bruel et al.
patent: 6323108 (2001-11-01), Kub et al.
patent: 6323109 (2001-11-01), Okonogi
patent: 6346458 (2002-02-01), Bower
patent: 6362077 (2002-03-01), Aspar et al.
patent: 6362082 (2002-03-01), Doyle et al.
patent: 6417075 (2002-07-01), Haberger et al.
patent: 6429094 (2002-08-01), Maleville et al.
patent: 6513564 (2003-02-01), Bryan et al.
patent: 6534380 (2003-03-01), Yamauchi et al.
patent: 6593212 (2003-07-01), Kub et al.
patent: 6596569 (2003-07-01), Bao et al.
patent: 6607969 (2003-08-01), Kub et al.
patent: 6632082 (2003-10-01), Smith
patent: 6645831 (2003-11-01), Shaheen et al.
patent: 6645833 (2003-11-01), Brendel
patent: 6653207 (2003-11-01), Ohya et al.
patent: 6727549 (2004-04-01), Doyle
patent: 6756285 (2004-06-01), Moriceau et al.
patent: 6756286 (2004-06-01), Moriceau et al.
patent: 6764936 (2004-07-01), Daneman et al.
patent: 6770507 (2004-08-01), Abe et al.
patent: 6774010 (2004-08-01), Chu et al.
patent: 6902987 (2005-06-01), Tong et al.
patent: 6946365 (2005-09-01), Aspar et al.
patent: 6947365 (2005-09-01), Lai et al.
patent: 6974759 (2005-12-01), Moriceau et al.
patent: 7029548 (2006-04-01), Aspar et al.
patent: 7052978 (2006-05-01), Shaheen et al.
patent: 7476596 (2009-01-01), Lieber et al.
patent: 7521292 (2009-04-01), Rogers et al.
patent: 2001/0007367 (2001-07-01), Ohkubo
patent: 2001/0007789 (2001-07-01), Aspar et al.
patent: 2002/0025604 (2002-02-01), Tiwari
patent: 2002/0083387 (2002-06-01), Miner et al.
patent: 2002/0145489 (2002-10-01), Cornett et al.
patent: 2002/0153563 (2002-10-01), Ogura
patent: 2002/0185684 (2002-12-01), Campbell et al.
patent: 2003/0077885 (2003-04-01), Aspar et al.
patent: 2003/0108715 (2003-06-01), Roberds et al.
patent: 2003/0119279 (2003-06-01), Enquist
patent: 2003/0134489 (2003-07-01), Schwarzenbach et al.
patent: 2003/0162367 (2003-08-01), Roche
patent: 2003/0199105 (2003-10-01), Kub et al.
patent: 2004/0009649 (2004-01-01), Kub et al.
patent: 2004/0029358 (2004-02-01), Park et al.
patent: 2004/0126708 (2004-07-01), Jing et al.
patent: 2004/0144487 (2004-07-01), Martinez et al.
patent: 2004/0171232 (2004-09-01), Cayrefoureq et al.
patent: 2004/0209441 (2004-10-01), Maleville et al.
patent: 2004/0222500 (2004-11-01), Aspar et al.
patent: 2005/002

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method for transfer of a thin layer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for transfer of a thin layer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for transfer of a thin layer will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2707379

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.