Lithographic apparatus, and motor cooling device

Details Lithographic apparatus, and motor cooling device Lithographic apparatus, and motor cooling device

2011-03-29

2011-03-29

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S072000, C355S075000, C310S053000, C165S108000

Reexamination Certificate

active

07916267

ABSTRACT:
A lithographic device includes a cooling device for removing heat from a motor. The cooling device has a cooling element provided in thermal contact with at least part of the motor. The cooling device further has a cooling duct assembly with a supply duct to supply a cooling fluid to the cooling element, and a discharge duct to discharge the cooling fluid from the cooling element. A pump causes the cooling fluid to flow through at least part of the cooling duct assembly. A flow control device controls a flow rate of the cooling fluid through at least part of the cooling duct assembly, to maintain a predetermined average temperature of the cooling fluid in the cooling element.

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Notice of Reasons for Rejection mailed Sep. 2, 2010 for Japanese Patent Application No. 2007-215558, 3 pgs.

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