Thermal measuring and testing – Temperature measurement – Combined with diverse art device
Reexamination Certificate
2011-08-23
2011-08-23
Verbitsky, Gail (Department: 2855)
Thermal measuring and testing
Temperature measurement
Combined with diverse art device
C374S147000, C374S001000, C156S345240, C156S345260, C156S345270, C438S014000, C438S005000, C118S708000, C118S712000
Reexamination Certificate
active
08002463
ABSTRACT:
The publication discloses a method for determining a temperature of a substrate, comprising: providing a gas channel that is confined by at least one wall having a certain wall temperature; providing a substrate in said gas channel, proximate to the at least one wall, such that a gap exists between a surface of the substrate and the at least one wall; providing a gas flow with a certain mass flow rate through said gas channel, which gas flow extends at least partially through said gap; determining a pressure drop in the gas flow along the gas channel; and deriving from said pressure drop the temperature of said substrate using a pre-determined relation between the pressure drop along the gas channel, the wall temperature and the temperature of the substrate, at said mass flow rate. Also disclosed is a device for implementing the disclosed method.
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Granneman Ernst H. A.
Kuznetsov Vladimir
Vermont Pascal
ASM International N.V.
Verbitsky Gail
Weingarten Schurgin, Gagnebin & Lebovici LLP
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