Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2011-05-10
2011-05-10
Pascal, Robert (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S189000, C333S199000
Reexamination Certificate
active
07940145
ABSTRACT:
A thin film piezoelectric bulk acoustic wave resonator has a multilayer structure including a piezoelectric thin film, a first metal electrode film, and a second metal electrode film. At least a part of the piezoelectric thin film is interposed between the first and second metal electrodes. A resonance part and a connection part are formed on an insulating substrate as films by a thin film forming apparatus. The resonance part vibrates in radial extension mode with a center of the piezoelectric thin film used as a node, the piezoelectric thin film of two resonance parts is polarized in a direction perpendicular to a film surface, and a width of the connection part is one-fourth or less of a width of two resonance parts.
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Asai Kengo
Isobe Atsushi
Matsumoto Hisanori
Hitachi , Ltd.
Marquez, Esq Juan Carlos A.
Pascal Robert
Stites & Harbison PLLC
Wong Alan
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